Vertron

Process Applications

LP CVD
Oxidation
Anneal (High Temp. / Low Temp.)
Diffusion

VERTRON Revolution is the latest product in our proven VERTRON series of 200-mm batch thermal processing systems. Customers can choose from a variety of models to suit their needs from high-mix low-volume production to mass production. It is also compatible with 150-mm or smaller wafers.

Features

Compatible with processes of other models in the proven VERTRON series
Incorporates the latest 300-mm technology for increased processing speed
High productivity (175 wafers) and low ceiling height (100 wafers) options are also available
Optional atmosphere control to accommodate processes sensitive to oxygen concentration and humidity
Controller architecture has been revamped to improve processing performance and eliminate risk of production stoppage