Courses

The training schedule at Kokusai consists of three core classes; Phase I, II, and III. Additional courses are available to allow for increased proficiency operating the automated components of the furnace to allow trainees to become proficient at various tasks. Custom courses can be tailored to meet any training need.

Phase I
Phase II
Phase III
Automation Operations
Skills Practice
Custom Courses

Courses available ON-LINE are denoted by
Contact training@ksec.com for details and registration.

Product	Courses
VERTRON III	VERTRON III VERTRON III Fundamentals VERTRON III Basic Operation and Maintenance VERTRON III Maintenance Skills Practice (ATM or CVD) VERTRON III Advanced Robotics
VERTRON	VERTRON V(S) VERTRON V(S) Fundamentals VERTRON V(S) Basic Operation and Maintenance VERTRON V(S) Maintenance Skills Practice (ATM or CVD) VERTRON V(S) Advanced Robotics VERTRON V(S) Interlock Trouble Shooting
ZESTONE III,	ZESTONE III/V Fundamentals ZESTONE III/V Basic Operation and Maintenance ZESTONE III/V Maintenance Skills Practice (ATM or CVD) ZESTONE III/V Advanced robotics
QUIXACE	QUIXACE Fundamentals QUIXACE Basic Operation and Maintenance QUIXACE Maintenance Skills Practice (ATM or CVD) QUIXACE Advanced robotics
ZESTONE 3CN	ZESTONE 3CN Fundamentals ZESTONE 3CN Basic Operation and Maintenance ZESTONE 3CN Maintenance Skills Practice (ATM or CVD) ZESTONE 3CN Advanced robotics
SUBSYSTEMS	Block Controller Training (VERTRON Only)

Phase I

Phase I provides the foundational information needed by any personnel working on Kokusai equipment. All other courses build on the knowledge developed in this class.

Phase I is a prerequisite for the Phase II class, the Phase III class and the Skills practice course.

Course Length: One week

Synopsis

• Safety orientation
• Theory of operation for Atmospheric furnaces
• Theory of operation for Chemical Vapor Deposition furnaces
• Kokusai equipment configurations
• Identify and describe major components
• Identify and describe on-board controllers
• Operator interface lecture. This lecture provides a basic introduction to the many screens of the main controller.
• Robotic controls lecture
• Basic furnace operations including:
  • Furnace startup and shutdown
  • Loading and unloading of cassettes
• Recipe selection

Phase II

Phase II is the core of the Kokusai equipment training courses providing advanced lectures in equipment operations, maintenance, and troubleshooting. Concepts introduced in Phase I are expanded upon to give the trainees the knowledge they need to successfully operate, maintain, and troubleshoot Kokusai furnaces.

Phase III is a prerequisite for the Phase III class.

Course Length: Two weeks

• Safety orientation
• Interlock operation for atmospheric furnaces
• Interlock operation for Chemical Vapor Deposition furnaces
• Recipe structure and creation
• Recipe tables structure
• Temperature control theory
• Chemical Vapor Deposition furnace reactor removal and replacement
• Atmospheric reactor chamber removal and replacement
• Water vapor generator theory
• Hydrogen burn box theory
• Furnace automation maintenance
• Load Lock maintenance
• Furnace automation error recovery

Phase III

Phase III provides advanced robotics training that will allow the student to troubleshoot, replace, and align the automation components of Kokusai furnaces. The Phase III course is an intense hands-on experience that develops the necessary skills to restore furnaces to full operation when robotics problems are encountered.

Phase I is a prerequisite for the Phase II class, the Phase III class and the Skills practice course.

Course Length: Two weeks

Synopsis

• Safety orientation
• Mechanical controller theory and operation
• Identification and operation of major robotics assemblies
• Identification and operation of robotics sub-assemblies
• Robotics troubleshooting
• Removal and replacement of major robotics assemblies
• Removal and replacement of robotics sub-assemblies
• Alignment of major robotics assemblies and sub-assemblies

Automation Operations

Automation Operations is a week of intensive hands-on robotics training. Personnel attending this course will become proficient at performing all robotic movements and teaching the cassette loader robot and wafer transfer robot. This class is a must-have for any personnel who need to move the robotic elements of the tool.

The Automation Operations course is a prerequisite for Phase III and the Skill Practice courses.

Course Length: One week

Synopsis:

• Perform complex cassette and wafer moves
• Perform automatic mechanism moves
• Teach all axis of the cassette loader robot
• Teach all axis of the wafer transfer robot

Skills Practice

The Skills Practice course provides personnel an opportunity to become proficient performing the robot greasing and quartz change PMs. Many manufacturing facilities do not have the available equipment downtime needed for personnel to achieve proficiency performing these two vital PMs. The Skills Practice course is great way to help personnel qualify and become useful contributors to the manufacturing facility.

Course Length: Two weeks

• Perform three front end equipment greasings, including:
  • All cassette loader axis
  • All pod opener front greasing points (If applicable)
  • Front shutter and stage
• Perform three rear end equipment greasings: including:
  • All wafer transfer robot axis
  • Boat elevator
  • Pod opener rear components (If applicable)
• Perform at least three individual quartz changes.

The Skills Practice course is available for the following equipment configurations:

• ZESTONE III(B) CVD quartz
• QUIXACE Atmospheric quartz
• VERTRON V Atmospheric quartz change (Load-Lock chamber enabled)
• VERTRON III(A) CVD and Atmospheric quartz
  

Custom Courses

While the KSEC training center offers a wide array of pre-structured classes designed to meet our customers' needs, we also offer the flexibility of custom courses. KSEC can tailor any course to meet the specific requirements of our customers in order to ensure the trainees gain the desired knowledge.