PRODUCTS
Controls & Supervisory Systems |
Vertical Systems:
CX3000 Series
(Tube Control) |
The CX3000 is a tube controller featuring color display and touch panel-type operation. Capable of automatically recording data about fluctuations in temperature, gas, and pressure levels, as well as error and product information, the CX3000 facilitates troubleshooting and allows process analysis. Up to 100 files can be stored to handle complicated and diversified wafer processing. |
CX5000 Series
(Tube Control) |
The CX5000 is the main tube controller for 300mm vertical systems featuring a 15” color display and touch panel-type operation. Capable of automatically recording data about fluctuations in temperature, gas, and pressure levels, as well as error and product information, the CX5000 facilitates advanced troubleshooting and allows process analysis. The CX5000 has much more data and process related information available to the end user than its predecessor CX3000. |
CX9600 Series
(Supervisory System) |
The CX9600 series of block controllers are mini-computers developed to regulate operation of a number of semiconductor manufacturing systems. Functions include automating an entire production line or con trolling certain systems within the line.
The CX-9620 can be connected with a CIM system through a host computer. By linking the CX-9620 block controller, vertical diffusion/CVD systems, and host computer, quick ramp-up, improved TAT, automatic data collection, and easy maintenance control are possible.
The CX-9630 can be connected to vertical diffusion/CVD systems and provide remote monitoring functionality to users.
By using CX9630 with CX3000 direct host linkage improved reliability of online operation, automatic data collection, remote access, and easy maintenance control are possible.
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CX9800 Series
(Equipment Management Engineering System )
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The CX9800 is an equipment engineering management system which is dedicated for CX5000 control system. With a standard database system, allt he process and event data are stored as engineering data
You can access to the precise data from office, and easy to merge the data to your Windows environment. And itremote access to the system operation unit and increases the maintenance ability.
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