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- Materials such as silicon, polysilicon, etc.
- Ion implantation, diffusion, metal films, etc.
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| VR300DSE-2P is a full automatic type four-probe measurement System. Thanks to our probe movement control systems, which is one of our core technologies, the System can measure a resistance and a sheet resistance of conductive samples such as silicon wafers, magnetic thin plates, etc. with a high degree of accuracy. |
- Probe movement control mechanisms measure very thin films and very shallow ion implantation layers keeping high accuracy.
- Optimum prove movement can be set up with recipes.
- Further enhanced high-throughput realizes reduction of CoO.
- Available for two load ports.
- An automatic conditioning function for a probe tip is available.
- It is possible to make images such as contour maps or 3D maps to show resistance distribution.
- Operability is upgraded because of screens compatible with SEMI E95.
- Compatible with automated systems for 300mm lines.
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