QUIXACE is Kokusai's new platform for vertical, batch processing of 300mm wafers. QUIXACE offers throughput enhancements on core diffusion and LPCVD technologies through advances in temperature control, wafer handling automation, reactor purge, and temperature ramping. Incorporating over 20 years of vertical, batch technology into one platform, Kokusai is proud to offer the QUIXACE as the new platform for today's manufacturing environment and the solution for tomorrow's challenges.

The QUIXACE platform is available in a number of configurations including Large Batch (QL), Vacuum Load Lock (QV), Mini Batch (QM), Nitrogen Purge Load Area (QLN or QMN). Several standard options are also available for continuous batch processing.