CX9600 Series
CX9800 Series
The CX9600 series Block Control
System is a set of mini-computers developed to regulate operations
between of a number of semiconductor manufacturing systems. The
operations regulated include automating an entire production line or con
trolling certain systems within the line. The CX9600 series can be
connected with a CIM system through a host computer. Customers have
experienced improved temperature ramp-up, reduced cycle times, and easier
maintenance control by linking the CX-9600 series Block Control System to
their vertical diffusion/CVD systems.
The CX9800 is an equipment
engineering management system which is dedicated for CX5000 control
system. With a standard database system, all the process and event data
are stored as engineering data
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Specifications
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CX9620
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CX9630
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monitor
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color LCD (17 inch)
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color LCD (17 inch)
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operation
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mouse and key board
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mouse and key board
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auxiliary storage
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HDD (73GB or 300GB)
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HDD (73GB or 300GB)
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external storage
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DAT or MO (option)
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DAT or MO (option)
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equipment control
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max 32 furnaces
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max 32 furnaces
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x-terminal
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max 3 terminals
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max 9 terminals
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alarm history
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400 data / system
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400 data / system
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event data report
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500 batches / system
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500 batches / system
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point data report
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500 batches / system
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500 batches / system
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trace data report
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100 batches / system
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100 batches / system
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production recipes
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500 batches / system
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300 batches / system
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CX9800
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monitor
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color LCD (17 inch)
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operation
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mouse and key board
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storage
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HDD (300GB x 6 for 1 DB server)
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external storage
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DAT or MO (option)
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equipment
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max 128 furnaces (depends on server configuration)
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x-terminal
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8 furnaces need 1 DB server
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alarm history
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32 furnaces need 1 communication server
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event data report
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128 furnaces need 1 general management server
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GUI PC
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max 10 PCs
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Data Store
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3 months
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Benefits and features
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Host link capabilities
- SECS-I , II compliant
- Supports GEM, HSMS applications and user
individual spec
Data management
capabilities
- Automatic Data Collection
- Graphic display of system status
- Full spectrum of data displayed: operation,
maintenance, alarm, event, point, trace, etc. Back-up/restore function
for data
- Recipe edit and maintenance schedule control
function
- Up-time rate calculation function
- Statistical calculation of processing data
(optional)
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