Block Controllers

CX9600 Series
CX9800 Series

The CX9600 series Block Control System is a set of mini-computers developed to regulate operations between of a number of semiconductor manufacturing systems. The operations regulated include automating an entire production line or con trolling certain systems within the line. The CX9600 series can be connected with a CIM system through a host computer. Customers have experienced improved temperature ramp-up, reduced cycle times, and easier maintenance control by linking the CX-9600 series Block Control System to their vertical diffusion/CVD systems.

The CX9800 is an equipment engineering management system which is dedicated for CX5000 control system. With a standard database system, allt he process and event data are stored as engineering data

Specifications

	CX9620	CX9630
monitor	color LCD (17 inch)	color LCD (17 inch)
operation	mouse and key board	mouse and key board
auxiliary storage	HDD (73GB or 300GB)	HDD (73GB or 300GB)
external storage	DAT or MO (option)	DAT or MO (option)
equipment control	max 32 furnaces	max 32 furnaces
x-terminal	max 3 terminals	max 9 terminals
alarm history	400 data / system	400 data / system
event data report	500 batches / system	500 batches / system
point data report	500 batches / system	500 batches / system
trace data report	100 batches / system	100 batches / system
production recipes	500 batches / system	300 batches / system

	CX9800
monitor	color LCD (17 inch)
operation	mouse and key board
storage	HDD (300GB x 6 for 1 DB server)
external storage	DAT or MO (option)
equipment	max 128 furnaces (depends on server configuration)
x-terminal	8 furnaces need 1 DB server
alarm history	32 furnaces need 1 communication server
event data report	128 furnaces need 1 general management server
GUI PC	max 10 PCs
Data Store	3 months

Benefits and features


	Host link capabilities SECS-I , II compliant Supports GEM, HSMS applications and user individual spec Data management capabilities Automatic Data Collection Graphic display of system status Full spectrum of data displayed: operation, maintenance, alarm, event, point, trace, etc. Back-up/restore function for data Recipe edit and maintenance schedule control function Up-time rate calculation function Statistical calculation of processing data (optional)

CX9600 Series CX9800 Series

Specifications

Benefits and features

CX9600 Series
CX9800 Series