PRODUCTS
ALDINNA Large Batch ALD

ALDINNA is innovative and unique process tool that employs a mass production configuration along with advanced plasma technologies.

Using its well established 200mm and 300mm vertical batch platforms, Kokusai optimized the reactor design and gas switching technology to create our ALDINNA batch ALD system which achieves the fast and uniform precursor distribution that is essential to an ALD process and superior film qualities.

Customer's interested in a low cost of ownership (CoO) want to maintain a batch environment for the ALD process as it is an inherently slow process depositing one atomic-layer at a time.

• Low Temperature Deposition
• 200mm & 300mm Wafer Capable
• High Throughput by Batch Processing