CX5000 Series
The CX5000 is the main tube controller for 300mm vertcal systems featuring a 15” color display and touch panel-type operation. Capable of automatically recording data about fluctuations in temperature, gas, and pressure levels, as well as error and product information, the CX5000 facilitates advanced troubleshooting and allows process analysis. The CX5000 has much more data and process related information available to the end user than its predecessor CX3000.
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Functions
- Runs recipes
- Provides operator interface
- Sends control sig nals to all other controllers
- Stores all files for recipe operations, saved mechanical parameters and process history.
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CX5000 Feature and Benefits
Host link capabilities
• SECS-II compliant
• Supports GEM, HSMS applications and user individual spec
Data management capabilities
• Automatic Data Collection
• Graphic display of system status
• Full spectrum of data displayed: operation, maintenance, alarm, event, point, trace, etc.
• Back-up/restore function for data
• Complete Recipe Management and maintenance schedule control function
• Statistical calculation of processing data (optional)
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