The CMC-300 System greatly reduces Overhead-Vehicle downtime during robotics teaching operations for the 300mm Hitachi-Kokusai Vertical Diffusion Furnace.
The System allows operators to stand outside of the Kokusai VDF and teach all of the CX, CS, and CR teach points without opening the upper cabinet doors which would otherwise interfere with the OHV
One of the most important benefits of the CMC-300 System is the amount of time saved during teaching operations of the tool’s Cassette Loader.
The CMC-300 System is not only useful for Kokusai VDF’s, it can also be used on any equipment that moves FOUPS using the industry standard bottom positioning holes.
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