System Platform
Process	VERTRON 200mm Vertical Batch	QUIXACE 300mm Vertical Batch	ALDINNA 200/300mm ALD Platform	Hi-k Gate Cluster Tool 200mm/300mm Cluster Tool	MARORA Plasma Oxy-nitride	Other
Oxy - Nitride
High k
RTO, RTN, RTA
Low Temp Nitride
Epi
Substrate: SOI N2, H2 & Ar Anneals
BIO Batch Isotropic Oxidation
Silicon Nitride
Poly Silicon
HTO
TEOS
Oxide
Thin Gate Oxide
Anneal
Plasma Ashing
Resistivity