Kokusai’s array of low temperature nitride offerings includes BCD Nitride and CVD Nitride. Many IC manufacturers are employing organic based low temperature silicon nitride solutions in order to reduce process temperature while avoiding drastic reductions in deposition rate. Kokusai has over five years of organic precursor Nitride experience. This experience is reflected in our tool configurations,
in-situ gas cleans, scheduled downtime reduction strategies, and process understanding.
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