Kokusai Semiconductor Equipment Corporation

Kokusai Semiconductor Equipment Corporation (KSEC) provides comprehensive North American operations for its parent company, Hitachi Kokusai Electric - a premiere global supplier of Semiconductor Manufacturing Equipment. KSEC is headquartered in San Jose, California and has a strategic parts, service and training facility in Vancouver, Washington.

TΛNDUO™ 300mm Ashing System


	A Quick Reference for finding the right system for your process and application

CMC-300 Optical Alignment System

VR300DS 4-Point Resistivity Probe

Vertical Systems
	ALDINNA Large Batch ALD
	QUIXACE 300mm Vertical Furnace
	QUIXACE 300mm Vacuum Load Lock
	VERTRON 200mm Vertical Furnace
	VERTRON LL 200mm Vacuum Load Lock
Single-Wafer Systems
	Hi-K Gate Cluster Tool
	MARORA Plasma
	TΛNDUO™ 300mm Ashing System NEW
	VR300 4-Point Resistivity Probe NEW
Controls & Supervisory Systems
	CX3000 Series: (Tube Control)
	CX5000 Series: (Tube Control)
	CX9600 Series: (Supervisory System)
	CX9800 Series: (Management System)

	Atomic Layer Deposition (ALD)
	Plasma Oxidation & Nitridation
	High k Gate
	Low Temperature Nitrides
	Batch Epi
	N₂, H₂ & Ar Anneals (Substrate SOI)
	Batch Isotropic Oxidation (BIO)
	Plasma Ashing

Diffusion/LPCVD/Anneal Systems

	Silicon Nitride		Oxide
	Poly Silicon		Thin Gate Oxide
	HTO		Anneals
	TEOS

Kokusai has solutions for a wide variety device structures. To find the right system tool for your needs, contact your local Kokusai representative.