Kokusai Semiconductor Equipment Corporation

Kokusai Semiconductor Equipment Corporation (KSEC) provides comprehensive North American operations for its parent company, Hitachi Kokusai Electric - a premiere global supplier of Semiconductor Manufacturing Equipment. KSEC is headquartered in San Jose, California and has a strategic parts, service and training facility in Vancouver, Washington.

Lambda 300mm Ashing System

A Quick Reference for finding the right system for your process and application

Vertical Systems
	ALDINNA Large Batch ALD
	QUIXACE 300mm Vertical Furnace
	QUIXACE 300mm Vacuum Load Lock
	VERTRON 200mm Vertical Furnace
	VERTRON LL 200mm Vacuum Load Lock
Single-Wafer Systems
	Hi-K Gate Cluster Tool
	MARORA Plasma
	LAMBDA300mm Plasma Asher NEW
Controls & Supervisory Systems
	CX3000 Series: (Tube Control)
	CX5000 Series: (Tube Control)
	CX9600 Series: (Supervisory System)
	CX9800 Series: (Management System)

	Atomic Layer Deposition (ALD)
	Plasma Oxidation & Nitridation
	High k Gate
	Low Temperature Nitrides
	Batch Epi
	N₂, H₂ & Ar Anneals (Substrate SOI)
	Batch Isotropic Oxidation (BIO)
	Plasma Ashing

Diffusion/LPCVD/Anneal Systems

	Silicon Nitride		Oxide
	Poly Silicon		Thin Gate Oxide
	HTO		Anneals
	TEOS

Kokusai has solutions for a wide variety device structures. To find the right system tool for your needs, contact your local Kokusai representative.